Siberian Federal University

The study results of solid-state synthesis of the Cu6Sn5 intermetallic in the Sn/Cu thinfilm systems during vacuum annealing from room temperature to 300 ◦C are presented. The initiation and finishing temperatures of the solid-state reaction between the Cu and Sn nanolayers and the phase composition of the reaction products were determined. The synthesized thin films were monophasic and consisted of the hexagonal η-Cu6Sn5 phase. It is assumed that the initiation temperature of the solidstate reaction in Sn/Cu thin films is associated with the start temperature of the reverse polymorphic transformation η ′ → η between the monoclinic and hexagonal Cu6Sn5 phases