Journal of Siberian Federal University. Engineering & Technologies / Development and Applications of MEMS Components

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Issue
Journal of Siberian Federal University. Engineering & Technologies. 2015 8 (3)
Authors
Levitskiy, Alexey A.; Marinushkin, Pavel S.
Contact information
Levitskiy, Alexey A.:Siberian Federal University 79 Svobodny, Krasnoyarsk, 660041, Russia; E-mail: ; Marinushkin, Pavel S.:Siberian Federal University 79 Svobodny, Krasnoyarsk, 660041, Russia
Keywords
microelectromechanical systems (MEMS); microelectromechanical resonators; SCREAM technology; microgyroscopes; inertial navigation; pedestrian navigation
Abstract

This article provides the results of the MEMS (MicroElectroMechanical Systems) components studies. The design considerations and manufacturing techniques of the silicon-based MEMS components are considered. Results of the experimental characterization of the fabricated prototypes are provided. Furthermore, discussion related to the future development of the MEMS components is also presented

Pages
290-296
Paper at repository of SibFU
https://elib.sfu-kras.ru/handle/2311/16837

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